Micro and Nanoelectromechanical Systems
Scanning Electron Microscopy (SEM) is an advanced imaging technique that uses focused beams of electrons to scan the surface of a specimen, producing highly detailed three-dimensional images. This method is particularly valuable in the study of Micro and Nano Electromechanical Systems (MEMS/NEMS) as it allows researchers to observe the topography, morphology, and composition of materials at the micro and nanoscale, which is crucial for testing and ensuring the reliability of these devices.
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