Micro and Nanoelectromechanical Systems
Soft lithography is a set of techniques used to create patterns on surfaces by utilizing elastomeric materials, typically poly(dimethylsiloxane) (PDMS), as stamps or molds. This process allows for the replication of micro- and nanoscale features with high precision and flexibility, making it especially useful in the fabrication of MEMS and NEMS devices. Soft lithography connects well with materials selection and the development of soft MEMS and flexible electronics due to its adaptability to various substrates and materials.
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