Micro and Nanoelectromechanical Systems
In the context of Micro and Nano Electromechanical Systems (MEMS), packaging refers to the method of enclosing and protecting sensitive components, ensuring their functionality, reliability, and integration within electronic systems. Effective packaging is crucial because it not only safeguards against environmental factors like moisture, temperature, and mechanical stresses but also plays a significant role in the overall performance and miniaturization of devices that utilize mechanical sensing principles such as piezoresistive, capacitive, and resonant sensing.
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